Patent Assignment
Reel/Frame 062089/0674
Assignment of Assignor's Interest
Recorded: 2022-12-14
Pages: 4
Assignor
KOT, MORDECHY
Executed: 2022-11-20
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Single-Cell Scatterometry Overlay with Sensitivity Calibration
Application:
17/987,580 →
Publication:
US 2024/0160114