Patent Assignment
Reel/Frame 062092/0358
Assignment of Assignor's Interest
Recorded: 2022-12-14
Pages: 4
Assignor
KIM, UIYONG
Executed: 2022-07-12
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 20006, KOREA, REPUBLIC OF
Covered Property
(1)
Electrostatic Chuck Including Upper Plate and Substrate Processing Apparatus Including the Same
Application:
18/081,281 →
Publication:
US 2023/0187253