Patent Assignment
Reel/Frame 062144/0663
Assignment of Assignor's Interest
Recorded: 2022-12-19
Pages: 8
Assignors
MATSUURA, SHIN
Executed: 2022-12-05
SASAKI, NOBUTAKA
Executed: 2022-12-02
PARK, GYEONG MIN
Executed: 2022-12-02
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Support, Plasma Processing Apparatus, and Ring Replacement Method