Patent Assignment
Reel/Frame 062190/0092
Assignment of Assignor's Interest
Recorded: 2022-12-22
Pages: 5
Assignors
ZHAO, JINRONG
Executed: 2022-12-14
ZHANG, YING
Executed: 2022-12-14
CHEN, XING
Executed: 2022-12-14
WEI, GANG
Executed: 2022-12-14
NIU, CHEN
Executed: 2022-12-14
XU, JINJI
Executed: 2022-12-14
WANG, SONG
Executed: 2022-12-14
Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
NO.8 WENCHANG AVENUE, BEIJING ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA, BEIJING, 100176, CHINA
Covered Property
(1)
Coil Structure and Plasma Processing Apparatus