Patent Assignment
Reel/Frame 062205/0681
Assignment of Assignor's Interest
Recorded: 2022-12-27
Pages: 3
Assignee
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
1-61, SHIROMI 2-CHOME, CHUO-KU, OSAKA-SHI, OSAKA, 540-6207, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method