Patent Assignment
Reel/Frame 062231/0500
Assignment of Assignor's Interest
Recorded: 2022-12-29
Pages: 3
Assignors
GAO, SONGQI
Executed: 2022-06-14
WONG, GOON HENG
Executed: 2022-06-14
CHEN, JACK
Executed: 2022-06-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Frontside and Backside Pressure Monitoring for Substrate Movement Prevention