Patent Assignment
Reel/Frame 062263/0194
Assignment of Assignor's Interest
Recorded: 2023-01-03
Pages: 2
Assignor
DEGUCHI, YASUNORI
Executed: 2022-12-20
Assignee
TOHO KASEI CO., LTD.
6-2, IMAGO-CHO, YAMATOKORIYAMA-SHI, NARA, 639-1031, JAPAN
Covered Property
(1)
Substrate Processing Module, Substrate Processing Apparatus, and Substrate Manufacturing Method
Application:
18/004,144 →
Publication:
US 2023/0256478
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.