Patent Assignment
Reel/Frame 062290/0250
Assignment of Assignor's Interest
Recorded: 2023-01-06
Pages: 5
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measurement Apparatus, Lithography Apparatus, and Article Manufacturing Method