Patent Assignment
Reel/Frame 062291/0812
Assignment of Assignor's Interest
Recorded: 2023-01-06
Pages: 4
Assignors
CHEN, HSUEH-JU
Executed: 2022-11-01
CHUI, CHI ON
Executed: 2022-11-03
LIN, TSUNG-DA
Executed: 2022-11-11
LAI, PEI YING
Executed: 2022-12-05
HSU, CHIA-WEI
Executed: 2022-10-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Volume-less Fluorine Incorporation Method
Application:
18/150,861 →
Publication:
US 2024/0071767