Patent Assignment
Reel/Frame 062316/0109
Assignment of Assignor's Interest
Recorded: 2023-01-09
Pages: 4
Assignors
HYUN, JAEIL
Executed: 2022-12-22
PARK, GIHONG
Executed: 2022-12-22
JU, JAESUNG
Executed: 2022-12-22
LEE, JOOYOUNG
Executed: 2022-12-22
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Cooling Unit, Apparatus for Processing a Substrate and Method of Processing a Substrate
Application:
18/146,699 →
Publication:
US 2023/0207347