Assignment of Assignor's Interest

Recorded: 2023-01-13 Pages: 8

Assignors

KAKO, TAKASHI

Executed: 2022-12-02

NAGAI, RYU

Executed: 2022-12-05

TANAKA, KOKI

Executed: 2022-12-02

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Etching Method and Plasma Processing Apparatus

Application: 18/070,469 →

Publication: US 2023/0170189