Patent Assignment
Reel/Frame 062404/0610
Assignment of Assignor's Interest
Recorded: 2023-01-18
Pages: 4
Assignor
SON, YOUNG JUN
Executed: 2023-01-06
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Wafer Treatment Apparatus Capable of Measuring Warpage of Wafer and Method of Measuring Warpage of Wafer