Patent Assignment
Reel/Frame 062427/0784
Assignment of Assignor's Interest
Recorded: 2023-01-19
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching with Metal Sputtering
Application:
18/156,900 →
Publication:
US 2024/0249927