Patent Assignment
Reel/Frame 062450/0530
Assignment of Assignor's Interest
Recorded: 2023-01-23
Pages: 12
Assignors
KOSHIMIZU, CHISHIO
Executed: 2022-11-22
TAMAMUSHI, GEN
Executed: 2022-11-24
INOUE, MASAHIRO
Executed: 2023-01-17
KOSAKA, YUTO
Executed: 2023-01-17
MATSUYAMA, SHOICHIRO
Executed: 2022-12-26
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Processing Method