Patent Assignment
Reel/Frame 062463/0934
Assignment of Assignor's Interest
Recorded: 2023-01-24
Pages: 8
Assignors
YUN, JI EUN
Executed: 2022-11-01
HWANG, BYUNG KEUN
Executed: 2022-11-01
KANG, MIN SOO
Executed: 2022-10-14
GEORGE, SHEBY MARY
Executed: 2022-10-13
BAE, WOO RI
Executed: 2022-10-13
HWANG, SUN HYE
Executed: 2022-11-03
OH, SEONG TAE
Executed: 2022-10-14
CHO, BYEONG OK
Executed: 2022-10-14
Assignees
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
WONIK MATERIALS CO., LTD.
30, YANGCHEONG 3-GIL, OCHANG-EUP, CHEONGWON-GU, CHEONGJU-SI, CHUNGCHEONGBUK-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Method for Fabricating Trihalodisilane and Method for Fabricating Semiconductor Device Using the Same
Application:
18/100,629 →
Publication:
US 2023/0264963