Assignment of Assignor's Interest

Recorded: 2023-01-24 Pages: 6

Assignors

MORI, KIYOSHI

Executed: 2022-10-17

FURUYA, HARUHIKO

Executed: 2023-01-16

Assignee

TOKYO ELECTRON LIMITED

3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Method of Transporting Workpiece and Processing Apparatus

Application: 17/969,923 →

Publication: US 2023/0128473