Patent Assignment
Reel/Frame 062489/0906
Assignment of Assignor's Interest
Recorded: 2023-01-26
Pages: 8
Assignors
MAEDA, HIRONORI
Executed: 2022-12-07
TAKAI, RYO
Executed: 2022-12-16
YANAGISAWA, MASAKATSU
Executed: 2022-12-06
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Detection Apparatus, Detection Method, Exposure Apparatus and Article Manufacturing Method