Patent Assignment
Reel/Frame 062495/0962
Assignment of Assignor's Interest
Recorded: 2023-01-26
Pages: 3
Assignor
HULSEBOS, EDO MARIA
Executed: 2020-08-25
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
A Method for Modeling Measurement Data Over a Substrate Area and Associated Apparatuses