Patent Assignment
Reel/Frame 062543/0261
Assignment of Assignor's Interest
Recorded: 2023-01-31
Pages: 3
Assignors
PAENG, DONG WOO
Executed: 2019-11-18
KIM, YUNSANG
Executed: 2019-11-21
ZHANG, HE
Executed: 2019-11-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etch Systems for Selectively Etching with Halogen-Based Compounds