Patent Assignment
Reel/Frame 062555/0658
Assignment of Assignor's Interest
Recorded: 2023-02-01
Pages: 5
Assignors
CHANDRASEKHARAN, RAMESH
Executed: 2020-03-04
ROBERTS, MICHAEL PHILIP
Executed: 2020-03-04
AGARWAL, PULKIT
Executed: 2020-03-04
LAVOIE, ADRIEN
Executed: 2020-03-04
KUMAR, RAVI
Executed: 2020-03-04
YANG, NUOYA
Executed: 2020-03-06
SOE, CHAN MYAE MYAE
Executed: 2020-03-04
SAURABH, ASHISH
Executed: 2020-03-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Trim and Deposition Profile Control with Multi-Zone Heated Substrate Support for Multi-Patterning Processes