Patent Assignment
Reel/Frame 062556/0042
Assignment of Assignor's Interest
Recorded: 2023-02-01
Pages: 3
Assignor
SADEGHI, HOSSEIN
Executed: 2020-03-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Measurement System to Measure a Thickness of an Adjustable Edge Ring for a Substrate Processing System