Patent Assignment
Reel/Frame 062574/0769
Assignment of Assignor's Interest
Recorded: 2023-02-02
Pages: 5
Assignors
HUANG, LI-TSO
Executed: 2023-01-11
CHANG, HSIU-KAI
Executed: 2023-01-12
WU, CHIN-YUAN
Executed: 2023-01-11
HSU, MING-CHE
Executed: 2023-01-11
Assignee
GRAND PROCESS TECHNOLOGY CORP.
NO. 89, SEC. 6, ZHONGHUA RD., XIANGSHAN DIST., HSINCHU CITY, 30095, TAIWAN
Covered Property
(1)
Single Wafer Spin Cleaning Apparatus with Soaking, Cleaning, and Etching Functions