Patent Assignment
Reel/Frame 062580/0671
Assignment of Assignor's Interest
Recorded: 2023-02-03
Pages: 10
Assignors
HAYASHI, IBUKI
Executed: 2023-01-23
TAKEUCHI, YASUSHI
Executed: 2023-01-23
HONMA, MANABU
Executed: 2023-01-23
TAGUCHI, JUNNOSUKE
Executed: 2023-01-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method