Patent Assignment
Reel/Frame 062621/0260
Assignment of Assignor's Interest
Recorded: 2023-02-08
Pages: 3
Assignors
YOSHIDA, TAKASHI
Executed: 2022-11-16
OKABE, KAI
Executed: 2022-11-16
LIU, ZECHENG
Executed: 2022-11-16
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method and System for Forming a Silicon Oxycarbide Layer and Structure Formed Using Same