Patent Assignment
Reel/Frame 062631/0221
Assignment of Assignor's Interest
Recorded: 2023-02-08
Pages: 5
Assignors
NEGORO, SEI
Executed: 2022-12-26
SHINOHARA, KENSUKE
Executed: 2022-12-19
TOKUYAMA, MASAHIRO
Executed: 2020-12-20
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Condition Setting Method, Substrate Processing Method, Substrate Processing Condition Setting System, and Substrate Processing System