Patent Assignment
Reel/Frame 062679/0713
Assignment of Assignor's Interest
Recorded: 2023-02-13
Pages: 3
Assignors
LIN, MING-HSUN
Executed: 2021-07-04
HO, YU-HSIANG
Executed: 2021-07-06
CHEN, JHUN HUA
Executed: 2021-07-06
LIAO, CHI-HUNG
Executed: 2021-07-12
CHUANG, TENG KUEI
Executed: 2021-07-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method and Apparatus for Improving Critical Dimension Variation