Patent Assignment
Reel/Frame 062754/0201
Assignment of Assignor's Interest
Recorded: 2023-02-21
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods for Retaining a Processing Liquid on a Surface of a Semiconductor Substrate