Patent Assignment
Reel/Frame 062757/0110
Assignment of Assignor's Interest
Recorded: 2023-02-21
Pages: 9
Assignors
BEZEL, ILYA
Executed: 2022-06-02
ZVEDENUK, LEONID BORISOVICH
Executed: 2022-12-01
STEPANOV, ANDREY EVGENIEVICH
Executed: 2023-02-01
RERIKH, VITALY K.
Executed: 2022-12-01
POTAPKIN, BORIS VASILYEVICH
Executed: 2023-01-12
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Laser-Sustained Plasma Light Source with Reverse Vortex Flow