Patent Assignment
Reel/Frame 062769/0878
Assignment of Assignor's Interest
Recorded: 2023-02-22
Pages: 3
Assignors
YAMAMOTO, AKIO
Executed: 2023-01-24
LI, WEN
Executed: 2023-01-26
OINUMA, HIROSHI
Executed: 2023-01-27
MIZUTANI, SHUNSUKE
Executed: 2023-01-24
Assignee
HITACHI HIGH-TECH CORPORATION
17-1, TORANOMON 1-CHOME, MINATO-KU, TOKYO, 105-6409, JAPAN
Covered Property
(1)
Charged Particle Beam Device and Charged Particle Beam Device Calibration Method