Patent Assignment
Reel/Frame 062790/0347
Assignment of Assignor's Interest
Recorded: 2023-02-23
Pages: 3
Assignor
SCHUBERT, STEFAN
Executed: 2023-02-21
Assignee
CARL ZEISS MULTISEM GMBH
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Multiple Particle Beam System with a Mirror Mode of Operation, Method for Operating a Multiple Particle Beam System with a Mirror Mode of Operation and Associated Computer Program Product
Application:
18/159,852 →
Publication:
US 2023/0170181