Patent Assignment
Reel/Frame 062801/0971
Assignment of Assignor's Interest
Recorded: 2023-02-24
Pages: 4
Assignors
YANG, KAIMING
Executed: 2023-02-23
CHENG, RONG
Executed: 2023-02-23
ZHU, YU
Executed: 2023-02-23
ZHANG, MING
Executed: 2023-02-23
LEI, SHENG
Executed: 2023-02-23
LIU, TAO
Executed: 2023-02-23
LU, SEN
Executed: 2023-02-23
LI, XIN
Executed: 2023-02-23
Assignee
TSINGHUA UNIVERSITY
POST BOX 100084 BRANCH 82, TSINGHUA UNIVERSITY, PATENT OFFICE, BEIJING, 100084, CHINA
Covered Property
(1)
Vertical Motion Protection Method and Device Based on Dual-Stage Motion System of Photolithography Machine