Patent Assignment
Reel/Frame 062818/0669
Assignment of Assignor's Interest
Recorded: 2023-02-27
Pages: 3
Assignee
SCREEN HOLDINGS CO., LTD.
1-1, TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus