Patent Assignment
Reel/Frame 062833/0727
Assignment of Assignor's Interest
Recorded: 2023-02-28
Pages: 4
Assignors
LI, WAIKIN
Executed: 2023-01-24
TAO, ZHENG
Executed: 2022-12-22
KIM, MIN-SOO
Executed: 2023-01-12
Assignee
IMEC VZW
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Method and Structure for Determining an Overlay Error