Patent Assignment
Reel/Frame 062841/0041
Assignment of Assignor's Interest
Recorded: 2023-03-01
Pages: 3
Assignor
MATSUMOTO, WATARU
Executed: 2023-02-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus for Transferring Member to Be Disposed in Substrate Processing Chamber, Substrate Processing System, and Method for Transferring Member