Patent Assignment
Reel/Frame 062861/0812
Assignment of Assignor's Interest
Recorded: 2023-03-02
Pages: 3
Assignors
SUN, TING-PI
Executed: 2022-11-01
LEE, HSIN-CHANG
Executed: 2022-11-01
HSU, PEI-CHENG
Executed: 2022-11-01
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Methods of Manufacturing Pellicle for Euv Lithography Masks
Application:
18/116,684 →
Publication:
US 2024/0069427