Patent Assignment
Reel/Frame 062875/0458
Assignment of Assignor's Interest
Recorded: 2023-03-03
Pages: 20
Assignors
ZUCKER, MARTIN L.
Executed: 2021-01-22
PAKULSKI, RYAN M.
Executed: 1999-11-08
MA, SHAWMING
Executed: 2021-01-24
YANG, MICHAEL X.
Executed: 2021-01-22
TEVIS, TED
Executed: 2021-01-26
LEMBESIS, PETER J.
Executed: 2019-06-11
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing Apparatus
Application:
17/994,985 →
Publication:
US 2023/0091035
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 3, 2023
From: WANSIDLER, ALEX; HEZLER, DIETER
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 062875/0442 →
Assignment of Assignor's Interest
Mar 3, 2023
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 062875/0478 →
Assignment of Assignor's Interest
Mar 3, 2023
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 062875/0482 →