Patent Assignment
Reel/Frame 062875/0482
Assignment of Assignor's Interest
Recorded: 2023-03-03
Pages: 10
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2019-09-25
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing Apparatus
Application:
17/994,985 →
Publication:
US 2023/0091035
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 3, 2023
From: WANSIDLER, ALEX; HEZLER, DIETER
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 062875/0442 →
Assignment of Assignor's Interest
Mar 3, 2023
From: ZUCKER, MARTIN L.; PAKULSKI, RYAN M.; MA, SHAWMING; YANG, MICHAEL X.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 062875/0458 →
Assignment of Assignor's Interest
Mar 3, 2023
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 062875/0478 →