Patent Assignment
Reel/Frame 062897/0037
Assignment of Assignor's Interest
Recorded: 2023-03-06
Pages: 5
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Method of Determining Position of Mark, Lithography Method, Exposure Apparatus, and Article Manufacturing Method