Patent Assignment
Reel/Frame 062912/0113
Assignment of Assignor's Interest
Recorded: 2023-03-07
Pages: 3
Assignor
MORIKUNI, YUICHIRO
Executed: 2023-02-03
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Control Apparatus, Lithography Apparatus, and Article Manufacturing Method