Patent Assignment
Reel/Frame 062934/0039
Assignment of Assignor's Interest
Recorded: 2023-03-09
Pages: 3
Assignor
KATO, TAKAAKI
Executed: 2023-02-21
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Semiconductor Device Manufacturing Method