Patent Assignment
Reel/Frame 062937/0793
Assignment of Assignor's Interest
Recorded: 2023-03-09
Pages: 8
Assignors
BEZEL, ILYA
Executed: 2023-02-18
ZVEDENUK, LEONID BORISOVICH
Executed: 2023-02-21
STEPANOV, ANDREY EVGENIEVICH
Executed: 2023-03-06
TORKAMAN, AMIR
Executed: 2023-01-24
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Swirler for Laser-Sustained Plasma Light Source with Reverse Vortex Flow