Patent Assignment
Reel/Frame 062947/0313
Assignment of Assignor's Interest
Recorded: 2023-03-10
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Method and Charged Particle Beam Writing Apparatus
Application:
17/956,021 →
Publication:
US 2023/0029715