Patent Assignment
Reel/Frame 062949/0187
Assignment of Assignor's Interest
Recorded: 2023-03-10
Pages: 4
Assignors
HUANG, LI-TSO
Executed: 2023-03-03
CHANG, HSIU-KAI
Executed: 2023-03-03
WU, CHIN-YUAN
Executed: 2023-03-03
HSU, MING-CHE
Executed: 2023-03-02
Assignee
GRAND PROCESS TECHNOLOGY CORPORATION
NO. 89, SEC. 6, ZHONGHUA RD., XIANGSHAN DIST.,, HSINCHU CITY, 30095, TAIWAN
Covered Property
(1)
Multifunctional Single Wafer Soaking-Spinning-Cleaning Device and Wafer Processing Method