Patent Assignment
Reel/Frame 062973/0322
Assignment of Assignor's Interest
Recorded: 2023-03-14
Pages: 4
Assignors
CHANDRASEKHARAN, RAMESH
Executed: 2021-07-22
SRINIVASAN, EASWAR
Executed: 2021-08-03
POHL, ERICA SAKURA STRANDBERG
Executed: 2021-08-09
BORTH, ANDREW
Executed: 2021-07-23
ALTECOR, ALEKSEY V.
Executed: 2021-07-23
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Concentration Control Using a Bubbler