Patent Assignment
Reel/Frame 062975/0922
Assignment of Assignor's Interest
Recorded: 2023-03-14
Pages: 5
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Parallax Method for a Single-Cell Diffraction Based Measurement of Misregistration
Application:
18/107,813 →
Publication:
US 2023/0259041