Patent Assignment
Reel/Frame 062979/0880
Assignment of Assignor's Interest
Recorded: 2023-03-14
Pages: 5
Assignors
HUANG, CHIH-FAN
Executed: 2022-01-14
LU, PO-SHENG
Executed: 2021-08-08
HUANG, CHEN-CHIU
Executed: 2021-08-08
CHEN, DIAN-HAU
Executed: 2021-08-08
CHEN, YEN-MING
Executed: 2021-08-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Memory Device with Spacer Protection and Method for Forming Same Using Multi-Step Patterning