Patent Assignment
Reel/Frame 063031/0652
Assignment of Assignor's Interest
Recorded: 2023-03-20
Pages: 2
Assignee
HITACHI HIGH-TECH CORPORATION
17-1, TORANOMON 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Method
Application:
18/027,188 →
Publication:
US 2024/0321583