Patent Assignment
Reel/Frame 063032/0616
Assignment of Assignor's Interest
Recorded: 2023-03-20
Pages: 2
Assignors
MATSUKURA, SATORU
Executed: 2023-02-27
KAMAJI, YOSHITO
Executed: 2023-03-03
TAMARI, NANAKO
Executed: 2023-02-27
KAGOSHIMA, AKIRA
Executed: 2023-02-28
SUMIYA, MASAHIRO
Executed: 2023-02-27
Assignee
HITACHI HIGH-TECH CORPORATION
17-1, TORANOMON 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Apparatus Diagnostic Apparatus, Semiconductor Manufacturing Apparatus System, and Semiconductor Apparatus Manufacturing System
Application:
18/027,200 →
Publication:
US 2024/0339308