Patent Assignment
Reel/Frame 063036/0816
Assignment of Assignor's Interest
Recorded: 2023-03-20
Pages: 4
Assignors
HIGASHI, KATSUEI
Executed: 2023-02-27
ENDO, TORU
Executed: 2023-02-27
TAKEMATSU, YUSUKE
Executed: 2023-02-27
TAKAGI, KEISUKE
Executed: 2023-02-27
YOSHIHARA, NAOHIKO
Executed: 2023-02-27
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method