Patent Assignment
Reel/Frame 063044/0732
Assignment of Assignor's Interest
Recorded: 2023-03-21
Pages: 5
Assignors
KOBAYASHI, NAOKI
Executed: 2023-03-07
TAKIZAWA, KANATA
Executed: 2023-03-07
MITSUI, RYO
Executed: 2023-03-07
YANO, TOSHIHARU
Executed: 2023-03-07
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
4-1, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, 100-0005, JAPAN
Covered Property
(1)
Composition for Forming Silicon-Containing Metal Hard Mask and Patterning Process
Application:
18/187,149 →
Publication:
US 2023/0305405